LAON TMD Co., Ltd.

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▮ laon tmd – System & equipment

LAON TMD provides full SiC Coating process solution: from CVD Chamber and utility to process recipe, designed specifically for every client.

OTHER COMPANIES LAON TMD
Base material/shaft 25ea/pole
Approximately
30ea/pole Approximately
Shaft amount 3 poles
1~9 poles Implemented
SiC Ring production volume 150ea 2ea from each base material 300ea 2ea from each base material (5 pole system)
Yield (~)
>95%
Total output 120ea 80% standard 275ea 95% standard
Process Low pressure
Atmospheric pressure
Process time Long-term
Can be adjusted
Ring resistance Only high resistance possible
Resistance selection possible

System and Chamber structure

CVD 2-System

(1 chamber/system)

Operating Pressure: 1kg/㎠G
Design Pressure: 1.5kg/㎠G
Operating Temp.: 1200℃~1500 ℃
Process Gas: MTS, N2, Ar, H2
PCW Flow:
– Chamber + Scrubber: 2500L/min
Power:
– M/C : 380V, 50kW
– Upper Heater Power: 380V, 150kW
– Lower Heater Power: 380V, 150kW
Air Source: 6 kgf/㎠ or less
Hydraulic unit supply source: 40kgf/cm2

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Implemented CVD System
CVD System modeling
Upper cover of CVD Chamber
CVD Chamber poles modeling
▮ UTILITY
  • Pumping/cooling pipe assembly
    • Vacuum/Safety Line
    • PCW (Process Cooling Water) Supply
    • PCW Return
    • Exhaust Line (to Scrubber)
  • MTS supply tank and pipe assembly
    • Service (Storage) Tank
    • Bubbler Tank
▮ laon tmd – PROCESS RESULTS
▮ Before process ▮
Graphite ring (thickness 6t)
150 Graphite rings mounted on 5 poles (30ea each)
  • Mounted graphite rings (5 poles x 30ea = 150ea)
  • Graphite ring thickness is 6t
▮ after process ▮
Rings after SiC Coating
SiC Rings
Total thickness equals 18.4t after coating
Each SiC Ring is 6.2t
Result
  • After SiC Coating, total thickness is 18.4t
  • 18.4t – 6t(graphite base) = 12.4t
  • Upper/Lower SiC coated layer thickness = 6.2t

LAON has achieved 100% deposition yield

• LAON solved the clogging problem – no clogged nozzles after 250 hours

• In other companies, nozzles get clogged after 150h of process

• Because of clogged nozzles, other companies’ yield drops

▮ characteristics ▮

• Yield : >95% (Spec >60%)

• By improving H/W and process recipe, LAON has achieved more than 95% yield (Other companies typically have 60~65%)

• Low resistivity, general resistivity, high resistivity all meet customer requirements ~100%

Industry-leading mass production equipment & process technology guaranteed

ITEM SPEC RESULT
Low Resistivity Total thickness (mm)*
19.2±3.6
(>60%)**
19.2±3.6
(100%)
Resistivity (Ω㎝)
<0.02
(>60%)
<0.02
(95.1%)
Average Resistivity Total thickness (mm)
19.2±3.6
(>60%)
19.2±3.6
(98%)
Resistivity (Ω㎝)
1~25
(>60%)
1~25
(98.7%)
High Resistivity Total thickness (mm)
19.2±3.6
(>60%)
>19.2
(100%)
Resistivity (Ω㎝)
>500
(>60%)
>500
(93%)

*Total thickness : including Graphite base thickness 6㎜
**(  ) : Yield

(Avg. Resistivity) Thickness map
Average resistivity map

▮ LAON CVD film (layer) characteristics comparison

Properties are ensured to be on the equivalent level as other companies.
Hardness, Thermal conductivity and Flexural strength are on a greater level.

PROPERTY
 Company
“A” 		Company
“B” 		Company
“C” 		LAON CVD Company
“D” 		Company
“E” 		Company
“F” 		Company
“G”
Purity(%) 99.9999
99.9999
99.999+
99.9999
99.9999 – 99.9995 99.9995
Density(g/cm³) 3.21
3.21
3.21
3.21
3.21 3.21 3.21 3.21
Thermal conductivity (W/mK) – High 200~360
267.2
200~400
377
320 273 220~250
127(HR)
220(LR)
Coefficient of thermal expansion(㎛/mK) – Low 4.5~5
4~4.5
4~5
4.6
4.5 4.1 4.5 4.6
Hardness(㎏/㎜²) – High 2900~3300
2540
>2500
3022
3100 2957~3059 2800
2651(HR)
2692(LR)
Flexural strength(MPa) – High 460
506.7
>240
450
420 391 370
447(HR)
590(LR)
Fracture toughness(MPam¹/²)





2.94 3.5
Grain size(㎛) 2.1

1~2
1~10 <1 <1
Resistivity(Ω㎝) 0.1~15,000 According to requirement 0.1~15,000 <0.02, 1~25, >500 <0.02, 0.2~10, >500 <0.02, 1~25, >500 <0.1, >1 <0.1, >10⁵
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Call or visit us : 09:00 ~ 18:00 (except Sat, Sun and public holidays)

TEL: 82-31-8077-2500 laontmd@laontmd.com 150-ho, 425, Doksanseong-ro, Osan-si, Gyeonggi-do, Republic of Korea, 18105