SPECIAL VALVES (BPS Series)

Patented Technologies | Customer Demo Evaluation

What is special about OUR valves?

BPS & BENEFIT

Bellows & O-ring seal Heating design > Minimized Polymer deposition
Minimized Valve In-line leak
Decreased Channel Down time (MTBF↑)
Increased Valve cleaning period

EASY MAINTENANCE

100% replacement with existing ISO valve available
Easy maintenance design of temp. heating module
Vacuum line modification is not required

PROCESS & APPLICATION

Etch, PECVD, Diffusion, ALD etc
Toxic Scrubber Inner valve, Toxic Exhausting Line valve and others
High polymer build-up process
Frequently repaired or replaced ISO valve

▮ Semiconductor fab layout & bps series application fields

▮ Patented TechnologIES

ITEM	Roughing Valve	Gate Valve	AGV Protection Gate Valve	RPS Angle/Gate Valve
BPS Type	BPS-CA	BPS-CG	BPS-PG	BPS-RG	BPS-RA-R	BPS-RA-P	BPS-RG
Product
Special features and advantages	• Inner Heating Type • Minimizes Polymer deposition • Simple installation	• Perfectly blocks Polymer deposition • Prevents polymer infiltration in the driving part • O-ring seal always maintains A grade quality • Additional Soft Pumping functionality	• Fastest closing speed in the world (Speed : < 0.1sec) • Prevents polymer infiltration in the driving part • O-ring seal always maintains A grade quality	• World’s first non-exposed O-ring valve • Perfectly blocks F* Radical • Prevents O-ring corrosion • Applies cooling		• Purge Gas Flow • Prevents O-ring corrosion • Applies cooling	• Ball Inner Heating Type • Maximizes Thermal Efficiency inside
Expected result	• PM (Preventive Maintenance) period extended in more than 3 times • Improved Pumping Conductance • Minimized formation of particles • Shortened Equipment’s down time • Reduced maintenance cost	• PM (Preventive Maintenance) period extended in more than 3 times • Valve’s driving unit stabilized • Reduced maintenance cost	• Prevents Wafer defects by restricting Backflow • Improved Manufacturing Yield • Stabilized Valve’s motion	• Minimized particle formation from O-ring corrosion • Prolonged PM period			• Minimizes polymer deposition inside • Stabilizes valve operation and prevents inner leakage • Prolonged PM period
Field of Application	ETCH, Thin Film, ETCH, Diffusion	ETCH, Thin Film, ETCH, Diffusion	ETCH, Thin Film, ETCH, Diffusion	Thin Film, ETCH			Thin Film, ETCH, Diffusion
Mount location	Chamber	Chamber,Trap	Dry Pump	Remote Plasma Chamber			Scrubber

▮ Main product (BPS-G) High-speed Backflow Preventing Vacuum Valve ▮

Development of the world’s first Movable Vacuum Line Valve.

Completely prevents backflow caused by dry pump down, improving semiconductor device production yield
Gate Vacuum Valve application: significantly improves cleaning cycle (guaranteed to be 3 times longer than other companies)

Perfectly prevented BACK STREAM
(<95msec closing time)
Designed for the inside heating
(Body/Seal plate)
Dual Sealing structure
(Excellent performance for vacuum sealing)
High MTBF (>3~4 times than conventional type)
(No polymer deposition, Minimum O-ring erosion)
Low COO (Cost Of Ownership)

BPS-PG (Auto Gate Valve + Protection Valve)
Double Close Seal Structure (Works as 2 sets of typical Valves)

Maintenance cycle is 3 times longer

▮ Main product (BPS-A) Heating Vacuum Valve ▮

Maximized Inner Heating. Suitable for equipment used in semiconductor, LED, and LCD device manufacturers. Long-term usability in equipment that generates a lot of polymers.

After solving problem of the angle valve affected by the severe polymer that occurred in the process chamber, the PM cycle was extended by more than 3 times.

Bellows shaft direct temp control (20⁰C ~120⁰C)
Minimize polymer build-up at the Shaft & Seal point
Maximize MTBF (> 4 times than conventional type)
No H/W issues at over 200,000 open/close cycle test
Stabilized Pumping Conductance Pressure
Easy replacement with conventional valve
Easy maintenance for the heating module
Proper Etch/PECVD/Diffusion/ALD process equipment
Available for NW24/40/50/80/160
Single or 2-stage valve
Bellows material (SS, AM350, Hastelloy)

Maintenance cycle is 4 times longer

You can find specification for our valves here:

specification

You can SEE HOW our valves PERFORMED here:

FIELD TEST

LET’S MEET EACH OTHER

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Call or visit us : 09:00 ~ 18:00 (except Sat, Sun and public holidays)

TEL: 82-31-8077-2500 laontmd@laontmd.com 150-ho, 425, Doksanseong-ro, Osan-si, Gyeonggi-do, Republic of Korea, 18105